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3D Silicon Double Gate |
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A 3D Double Gate MOSFET has been simulated by means of Aeneas.
The devices is defined by means of an input file which describes the doping regions, the boundary conditions, the applied voltage, the number of simulated particles and so on. Furthermore, a mesh file describes the diode shape. The input ASCII file is reported at the end of this page, while various 3D pictures obtained using Aeneas are shown in the following.
Please, note that the Monte Carlo simulation is coupled consistently to an unstructured mesh, which is a great advantage for novel 3D semiconductor devices.
The mesh is introduced by means of an ASCII file described the dimensions and geometry. Here is a graphical representation.
Here, the particles at the starting and the transient simulation time, respectively, in the mesh are represented.
The initial and transient computed electrostatic potential is shown in function of the final particles position, i.e. every particle has a color coupled to the potential it is feeling.
The final calculated potential field is reported in the following picture.
Finally the transient electron energy in function of the particles position is shown in the following picture.
The input file for this double Gate simulation reads :
# Input
file for the simulation of a Si Double Gate MOSFET simulated by Aeneas,
# the MC simulator for 3D unstructured meshes.
# www.southnovel.eu
# time step in seconds
TIMESTEP
0.0015e-12
# final time of simulation in seconds
FINALTIME
0.500e-12
# the code starts the mean average for velocity
# and energy at the last MEDIA time steps
MEDIA 500
# lattice temperature in Kelvin
LATTICETEMPERATURE
77
# save the data every number of steps
SAVEEVERYNUMSTEPS
50
# impurity density in 1/m^3
CIMP 1.e14
# contact type and applied voltage (meters, volts)
CONTACT X
0.0 0.0
Y 0.0 0.15e-6
Z
0.0 0.025e-6 OHMIC
0.0
CONTACT X
0.15e-6 0.15e-6
Y
0.0 0.15e-6
Z
0.0 0.025e-6
OHMIC
0.2
CONTACT X
0.03e-6
0.12e-6
Y
0.0 0.15e-6
Z
0.035e-6 0.035e-6
SCHOTTKY
0.05
CONTACT X
0.03e-6
0.12e-6
Y
0.0 0.15e-6
Z
-0.01e-6 -0.01e-6
SCHOTTKY
0.05
# statistical weight, i.e. the number of particles
in cell
# which have the maximum density value
STATISTICALWEIGHT
60
# the Poisson solver can be 1, 2, 3 or 4.
# it is used to select the method for solving the Poisson equation
POISSONSOLVER
4
# the tollerance for the Poisson solver
POISSONTOLLERANCE
1.e-16
# maximum number of iterations for the Poisson
solver
POISSONITMAX
1500
# material specification (Si is the default)
MATERIAL X
0.0 0.15e-6
Y
0.0 0.15e-6
Z
0.0 0.025e-6
SILICON
MATERIAL X
0.03e-6 0.12e-6
Y
0.0 0.15e-6
Z
0.025e-6 0.035e-6
SIO2
MATERIAL X
0.03e-6 0.12e-6
Y
0.0 0.15e-6
Z
-0.01e-6 0.0
SIO2
# donor density of the device in 1./m^3
DONORDENSITY X
0.0 0.05e-6 Y
0.0 0.15e-6
Z
0.0 0.025e-6 1.e23
DONORDENSITY X
0.05e-6 0.10e-6
Y
0.0 0.15e-6
Z
0.0 0.025e-6 1.e22
DONORDENSITY X
0.10e-6 0.15e-6
Y
0.0 0.15e-6
Z
0.0 0.025e-6 1.e23
DONORDENSITY X
0.03e-6 0.12e-6
Y
0.0 0.15e-6
Z
0.025e-6 0.035e-6 0.0
DONORDENSITY X
0.03e-6 0.12e-6
Y
0.0 0.15e-6
Z
-0.01e-6 0.0 0.0
# quantum effective potential taken into account
QUANTUMEFFECTS
# end of input file